Sec Form 4 Filing - Purvis Tyler Wayne @ MATTSON TECHNOLOGY INC - 2016-05-11

FORM 4 Check this box if no longer subject to Section 16. Form 4 or Form 5 obligations may continue. See Instruction 1(b).

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934, Section 17(a) of the Public Utility Holding Company Act of 1935 or Section 30(h) of the Investment Company Act of 1940

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1. Name and Address of Reporting Person Purvis Tyler Wayne 2. Issuer Name and Ticker or Trading Symbol MATTSON TECHNOLOGY INC [ MTSN] 5. Relationship of Reporting Person(s) to Issuer (Check all applicable) _____ Director _____ 10% Owner X __ Officer (give title below) _____ Other (specify below) Chief Accounting Officer (Last) (First) (Middle) 47131 BAYSIDE PARKWAY 3. Date of Earliest Transaction (MM/DD/YY) 05/11/2016 (Street) FREMONT, CA94538 4. If Amendment, Date Original Filed (MM/DD/YY) 6. Individual or Joint/Group Filing (Check Applicable Line) __ X __ Form filed by One Reporting Person _____ Form filed by More than One Reporting Person (City) (State) (Zip)

Table I - Non-Derivative Securities Acquired, Disposed of, or Beneficially Owned 1.Title of Security (Instr. 3) 2. Transaction Date (MM/DD/YY) 2A. Deemed Execution Date, if any (MM/DD/YY) 3. Transaction Code (Instr. 8) 4. Securities Acquired (A) or Disposed of (D) (Instr. 3, 4 and 5) 5. Amount of Securities Beneficially Owned Following Reported Transaction(s) (Instr. 3 and 4) 6. Ownership Form: Direct (D) or Indirect (I) (Instr. 4) 7. Nature of Indirect Beneficial Ownership (Instr. 4) Code V Amount (A) or (D) Price Common Stock 05/11/2016 D( 1 ) 40,611 D $ 3.8 0 D Restricted Stock Units (right to acquire) 05/11/2016 D( 2 ) 39,063 D $ 3.8 0 D

Table II - Derivative Securities Acquired, Disposed of, or Beneficially Owned ( e.g. , puts, calls, warrants, options, convertible securities) 1. Title of Derivative Security (Instr. 3) 2. Conversion or Exercise Price of Derivative Security 3. Transaction Date (MM/DD/YY) 3A. Deemed Execution Date, if any (MM/DD/YY) 4. Transaction Code (Instr. 8) 5. Number of Derivative Securities Acquired (A) or Disposed of (D) (Instr. 3, 4, and 5) 6. Date Exercisable and Expiration Date (MM/DD/YY) 7. Title and Amount of Underlying Securities (Instr. 3 and 4) 8. Price of Derivative Security (Instr. 5) 9. Number of Derivative Securities Beneficially Owned Following Reported Transaction(s) (Instr. 4) 10. Ownership Form of Derivative Security: Direct (D) or Indirect (I) (Instr. 4) 11. Nature of Indirect Beneficial Ownership (Instr. 4) Code V (A) (D) Date Exercisable Expiration Date Title Amount or Number of Shares Non-Qualified Stock Option (right to buy) $ 1.17 05/11/2016 D( 3 ) 28,208 04/04/2013 03/04/2020 Common Stock 28,208 $ 3.8 226,792 D Non-Qualified Stock Option (right to buy) $ 2.49 05/11/2016 D( 3 ) 5,625 04/20/2014 03/20/2021 Common Stock 5,625 $ 3.8 221,167 D Incentive Stock Option (right to buy) $ 2.73 05/11/2016 D( 3 ) 40,000 03/14/2013 03/14/2019 Common Stock 40,000 $ 3.8 181,167 D Incentive Stock Option (right to buy) $ 0.8975 05/11/2016 D( 3 ) 75,000 01/31/2014 10/31/2019 Common Stock 75,000 $ 3.8 106,167 D Incentive Stock Option (right to buy) $ 1.17 05/11/2016 D( 3 ) 31,166 04/04/2013 03/04/2020 Common Stock 31,166 $ 3.8 75,001 D Incentive Stock Option (right to buy) $ 1.17 05/11/2016 D( 4 ) 15,626 06/04/2016 03/04/2020 Common Stock 15,626 $ 3.8 59,375 D Incentive Stock Option (right to buy) $ 2.49 05/11/2016 D( 3 ) 10,000 04/20/2014 03/20/2021 Common Stock 10,000 $ 3.8 49,375 D Incentive Stock Option (right to buy) $ 2.49 05/11/2016 D( 4 ) 14,375 05/20/2016 03/20/2021 Common Stock 14,375 $ 3.8 35,000 D Incentive Stock Option (right to buy) $ 3.29 05/11/2016 D( 3 ) 10,937 02/15/2015 01/15/2022 Common Stock 10,937 $ 3.8 24,063 D Incentive Stock Option (right to buy) $ 3.29 05/11/2016 D( 4 ) 24,063 05/15/2016 01/15/2022 Common Stock 24,063 $ 3.8 0 D

Reporting Owners Reporting Owner Name / Address Relationships Director 10% Owner Officer Other Purvis Tyler Wayne 47131 BAYSIDE PARKWAY FREMONT, CA94538 Chief Accounting Officer Signatures Tyler Purvis 05/11/2016 Signature of Reporting Person Date

Explanation of Responses:

( 1 )Pursuant to the Agreement and Plan of Merger providing for the merger of Dragon Acquisition Sub, Inc., an indirect subsidiary of Beijing E-town Dragon Semiconductor Industry Investment Center (Limited Partnership), with and into Mattson Technology, Inc., each share of Mattson's common stock will be cancelled and converted into the right to receive $3.80 in cash, without interest. ( 2 )Pursuant to the Merger Agreement, each restricted stock unit was converted into the right to receive cash equal to $3.80, subject to the same vesting terms and conditions as the original restricted stock unit grant. ( 3 )Pursuant to the Merger Agreement, each option to purchase common stock was converted into the right to receive cash, without interest, equal to $3.80, less the per share exercise price. ( 4 )Pursuant to the Merger Agreement, each option to purchase common stock was converted into the right to receive cash equal to $3.80 less the per share exercise price, subject to the same vesting terms and conditions as the original option grant.

Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly.

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