Sec Form 4 Filing - Dyck Richard E. @ MATTSON TECHNOLOGY INC - 2016-05-11

FORM 4 Check this box if no longer subject to Section 16. Form 4 or Form 5 obligations may continue. See Instruction 1(b).

UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934, Section 17(a) of the Public Utility Holding Company Act of 1935 or Section 30(h) of the Investment Company Act of 1940

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1. Name and Address of Reporting Person Dyck Richard E. 2. Issuer Name and Ticker or Trading Symbol MATTSON TECHNOLOGY INC [ MTSN] 5. Relationship of Reporting Person(s) to Issuer (Check all applicable) X __ Director _____ 10% Owner _____ Officer (give title below) _____ Other (specify below) (Last) (First) (Middle) 47131 BAYSIDE PARKWAY 3. Date of Earliest Transaction (MM/DD/YY) 05/11/2016 (Street) FREMONT, CA94538 4. If Amendment, Date Original Filed (MM/DD/YY) 6. Individual or Joint/Group Filing (Check Applicable Line) __ X __ Form filed by One Reporting Person _____ Form filed by More than One Reporting Person (City) (State) (Zip)

Table I - Non-Derivative Securities Acquired, Disposed of, or Beneficially Owned 1.Title of Security (Instr. 3) 2. Transaction Date (MM/DD/YY) 2A. Deemed Execution Date, if any (MM/DD/YY) 3. Transaction Code (Instr. 8) 4. Securities Acquired (A) or Disposed of (D) (Instr. 3, 4 and 5) 5. Amount of Securities Beneficially Owned Following Reported Transaction(s) (Instr. 3 and 4) 6. Ownership Form: Direct (D) or Indirect (I) (Instr. 4) 7. Nature of Indirect Beneficial Ownership (Instr. 4) Code V Amount (A) or (D) Price Restricted Stock Units (right to acquire) 05/11/2016 D( 1 ) 24,875 D $ 3.8 112,525 D Common Stock 05/11/2016 D( 2 ) 112,525 D $ 3.8 0 D

Table II - Derivative Securities Acquired, Disposed of, or Beneficially Owned ( e.g. , puts, calls, warrants, options, convertible securities) 1. Title of Derivative Security (Instr. 3) 2. Conversion or Exercise Price of Derivative Security 3. Transaction Date (MM/DD/YY) 3A. Deemed Execution Date, if any (MM/DD/YY) 4. Transaction Code (Instr. 8) 5. Number of Derivative Securities Acquired (A) or Disposed of (D) (Instr. 3, 4, and 5) 6. Date Exercisable and Expiration Date (MM/DD/YY) 7. Title and Amount of Underlying Securities (Instr. 3 and 4) 8. Price of Derivative Security (Instr. 5) 9. Number of Derivative Securities Beneficially Owned Following Reported Transaction(s) (Instr. 4) 10. Ownership Form of Derivative Security: Direct (D) or Indirect (I) (Instr. 4) 11. Nature of Indirect Beneficial Ownership (Instr. 4) Code V (A) (D) Date Exercisable Expiration Date Title Amount or Number of Shares Non-Qualified Stock Option (right to buy) $ 2.12 05/11/2016 D( 3 ) 12,500 05/28/2015 05/28/2021 Common Stock 12,500 $ 3.8 76,000 D Non-Qualified Stock Option (right to buy) $ 2.14 05/11/2016 D( 3 ) 18,000 07/29/2014 07/29/2020 Common Stock 18,000 $ 3.8 58,000 D Non-Qualified Stock Option (right to buy) $ 0.88 05/11/2016 D( 3 ) 18,000 07/31/2013 07/31/2019 Common Stock 18,000 $ 3.8 40,000 D Non-Qualified Stock Option (right to buy) $ 1.77 05/11/2016 D( 3 ) 16,000 08/01/2012 08/01/2018 Common Stock 16,000 $ 3.8 24,000 D Non-Qualified Stock Option (right to buy) $ 3.3 05/11/2016 D( 3 ) 24,000 01/29/2011 01/29/2017 Common Stock 24,000 $ 3.8 0 D

Reporting Owners Reporting Owner Name / Address Relationships Director 10% Owner Officer Other Dyck Richard E. 47131 BAYSIDE PARKWAY FREMONT, CA94538 X Signatures By: Tyler Purvis For: Richard E Dyck 05/11/2016 Signature of Reporting Person Date

Explanation of Responses:

( 1 )Pursuant to the Merger Agreement, each restricted stock unit was converted into the right to receive cash, without interest, equal to $3.80. ( 2 )Pursuant to the Agreement and Plan of Merger providing for the merger of Dragon Acquisition Sub, Inc., an indirect subsidiary of Beijing E-town Dragon Semiconductor Industry Investment Center (Limited Partnership), with and into Mattson Technology, Inc., each share of Mattson's common stock will be cancelled and converted into the right to receive $3.80 in cash, without interest. ( 3 )Pursuant to the Merger Agreement, each option to purchase common stock was converted into the right to receive cash, without interest, equal to $3.80, less the per share exercise price.

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